Collision-Free Structure Using Thin-Film Magnet For Electrostatic Energy Harvester
نویسندگان
چکیده
This paper proposes collision-free structure using NdFeB thin-film magnet for vibration energy harvesters. By using stripe shaped NdFeB magnet array on the Si MEMS structure, we finally obtained 3 mN of magnetic repulsive force on 8 × 8 mm specimen with 40 μm air-gap.
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